Temperature sensor

A temperature sensor includes a substrate (1), platinum resistor (2) arranged on at least one surface of the substrate (1), a protective layer (4) covering at least a portion of the platinum resistor (2) and a cover layer (5) covering at least a portion of the protective layer (4), the cover layer (...

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Bibliographic Details
Main Authors CHEN YANG, BALASUBRAMANIAM VAIDHYANATHAN, ANTHONY HERLIHY, ANTHONY MAHER, O'SULLIVAN KATHERINE
Format Patent
LanguageEnglish
Published 20.05.2015
Subjects
MEASURING
MEASURING QUANTITY OF HEAT
MEASURING TEMPERATURE
PHYSICS
TESTING
THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
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Summary:A temperature sensor includes a substrate (1), platinum resistor (2) arranged on at least one surface of the substrate (1), a protective layer (4) covering at least a portion of the platinum resistor (2) and a cover layer (5) covering at least a portion of the protective layer (4), the cover layer (5) including Al2O3, SiO2 and Y2O3. The cover layer (5) may also include B2O3.
Bibliography:Application Number: CN201410571341