Drive system and drive method, and exposure device and exposure method

• Main Authors: ASAUMI HIROYOSHI, SAKATA KOICHI
• Format: Patent
• Language: English
• Published: 22.04.2015
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; CONTROLLING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; REGULATING; SEMICONDUCTOR DEVICES; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES

A composite variable (Xc=alphaX2+betaX1) is found using gains (or transmission coefficients) (alpha, beta) that correspond to measurement results (X2, X1) of first and second measuring instruments, and a composite control variable (Xmix=F1(Xc)+F2(X2, X1)) is found by synthesizing composite variable (Xc) and one of the measurement results (X2, X1) of the first and second measuring instruments via a high-pass filter (F1) and a low-pass filter (F2), respectively. An operation variable (U) is found using the composite control variable (Xmix) and a target value (R), and a feedback control system is configured with the operation variable (U) as the subject of control. There is thereby no need to add a high-pass filter for eliminating an offset in installation positions of the first and second measuring instruments, and a robust drive system for controlling plate stage (PST) driving can be designed that has high bandwidth regardless of the band at which resonance occurs.