Microwave plasma barometric pressure jetting device based on surface plasmon polariton

• Main Authors: ZHOU NIANDONG, WU QIUYUN, WANG PENG, ZOU CUNZUO, HAO JIANKUN, XU ZONGQI, XIA GUANGQING
• Format: Patent
• Language: English
• Published: 25.03.2015
• Subjects: ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS

The invention discloses a microwave plasma barometric pressure jetting device based on surface plasmon polariton. The microwave plasma barometric pressure jetting device comprises Y-shaped quartz tubes, metal exciters, a metal supporting sleeve and a microwave waveguide plate; the upper end of the metal exciters are fixedly connected to the connection positions of branches at the upper ends of the two Y-shaped quartz tubes, and the metal exciters extend to the lower end faces of the branches at the lower ends of the Y-shaped quartz tubes along the axes of the branches at the lower ends of the Y-shaped quartz tubes. The microwave plasma barometric pressure jetting device is based on the surface plasmon polariton technology, the high-electron-concentration and high-activity low-temperature nonequilibrium plasmas can be generated; a solid microwave source is adopted, the power of the solid microwave source ranges from 30 W to 100 W, power discharge can be achieved under the low power, convenience is brought to integration and miniaturization of the device, and the microwave plasma barometric pressure jetting device is convenient to carry, safe in operation and good in economical efficiency; two paths of working medium mixed gas can be adopted for power discharge, and material surface processing under the special working conditions can be achieved.