Method for coating photoresist on surface of hydrophobic insulating layer

• Main Authors: JIN MINGLIANG, SHUI LINGLING, ZHOU GUOFU, WEI BIMING, ZHANG MAORONG
• Format: Patent
• Language: English
• Published: 11.03.2015
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention discloses a method for coating a photoresist on the surface of a hydrophobic insulating layer. The method comprises the steps of directly coating a photoresist solution with high viscosity on the surface of the hydrophobic insulating layer through a coil bar coating method; carrying ou...