Mobile body device, exposure device, and device production method

• Main Author: MORIMOTO SHIGERU
• Format: Patent
• Language: English
• Published: 18.02.2015
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A stage device is provided with: stages (WST, MST) capable of moving along an XY flat surface on a stage base; a first and second magnet unit (51A, 51B) disposed on the respective stages (WST, MST); and a flat surface motor which has a coil unit (60) containing multiple coils arranged in a two-dimensional manner on the stage base, and which drives the stages (WST, MST) by means of the drive force generated by means of the electromagnetic interaction between the magnetic units (51A, 51B). The layout of the magnets on the coils (38) constituting the coil unit is determined such that the magnets constituting magnet unit (51A) and the magnets constituting magnet unit (51B) do not face one another at the same time when the stages (WST, MST) are in contact with one another or are next to one another within a predetermined distance relative to the Y axis direction on the stage base.