Mobile body device, exposure device, and device production method

A stage device is provided with: stages (WST, MST) capable of moving along an XY flat surface on a stage base; a first and second magnet unit (51A, 51B) disposed on the respective stages (WST, MST); and a flat surface motor which has a coil unit (60) containing multiple coils arranged in a two-dimen...

Full description

Saved in:
Bibliographic Details
Main Author MORIMOTO SHIGERU
Format Patent
LanguageEnglish
Published 18.02.2015
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online AccessGet full text

Cover

More Information
Summary:A stage device is provided with: stages (WST, MST) capable of moving along an XY flat surface on a stage base; a first and second magnet unit (51A, 51B) disposed on the respective stages (WST, MST); and a flat surface motor which has a coil unit (60) containing multiple coils arranged in a two-dimensional manner on the stage base, and which drives the stages (WST, MST) by means of the drive force generated by means of the electromagnetic interaction between the magnetic units (51A, 51B). The layout of the magnets on the coils (38) constituting the coil unit is determined such that the magnets constituting magnet unit (51A) and the magnets constituting magnet unit (51B) do not face one another at the same time when the stages (WST, MST) are in contact with one another or are next to one another within a predetermined distance relative to the Y axis direction on the stage base.
Bibliography:Application Number: CN201380031270