Vertically integrated system
The invention relates to a vertically integrated system comprising a first layer comprising an active circuit of a semiconductor tube core, which comprises a second layer of a circuit component; a circuit path capable of coupling the circuit component to the active circuit; and a third layer, which...
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
18.02.2015
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Subjects | |
Online Access | Get full text |
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Summary: | The invention relates to a vertically integrated system comprising a first layer comprising an active circuit of a semiconductor tube core, which comprises a second layer of a circuit component; a circuit path capable of coupling the circuit component to the active circuit; and a third layer, which is vertically stacked with the first layer and the second layer, comprises MEMS parts, and can be used for the communication with the semiconductor tube core. |
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Bibliography: | Application Number: CN201410454357 |