METHOD FOR FABRICATING PAD CONDITIONING TOOL

A method for fabricating a pad conditioning tool includes the steps: preparing a sapphire substrate with a specific orientation plane, wherein the specific orientation plane is selected from a group consisting of a-plane, c-plane, r-plane, m-plane, n-plane and v-plane; utilizing screen printing tech...

Full description

Saved in:
Bibliographic Details
Main Authors WEI KUANG-LING, TAI CHUN-HAN, DAI TZU-HSUAN
Format Patent
LanguageEnglish
Published 11.02.2015
Subjects
BASIC ELECTRIC ELEMENTS
DRESSING OR CONDITIONING OF ABRADING SURFACES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
PERFORMING OPERATIONS
POLISHING
SEMICONDUCTOR DEVICES
TRANSPORTING
Online AccessGet full text

Cover

More Information
Summary:A method for fabricating a pad conditioning tool includes the steps: preparing a sapphire substrate with a specific orientation plane, wherein the specific orientation plane is selected from a group consisting of a-plane, c-plane, r-plane, m-plane, n-plane and v-plane; utilizing screen printing technique and a screen plate in order to transfer an image pattern such that upon solidifying one side surface of the sapphire substrate is imprinted with the image pattern; and performing an etching process on the side surface of the sapphire substrate such that the side surface is formed with a plurality of micro particles of specific structures.
Bibliography:Application Number: CN20141306418