Modularized workflow control method of immersed photoetching machine fluid control system

• Main Authors: FU XIN, LI XING, CHEN WENYU, CHEN YIHUA
• Format: Patent
• Language: Chinese; English
• Published: 03.12.2014
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; ELECTROGRAPHY; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; HOLOGRAPHY; MATERIALS THEREFOR; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; REGULATING; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE

The invention discloses a modularized workflow control method of an immersed photoetching machine fluid control system. The method comprises the following steps of dividing the system into a plurality of control modules with different functions according to a transmission route and fluid properties of target system fluid; respectively establishing a workflow, a status bit and a fault bit of each control module; performing the time sequence cooperation of the workflows among the control modules under an automatic mode by adopting a blocking method, and calling an interface of each control module to control the workflow of each control module under a manual mode. According to the method, each module in the system can independently work, the influence of the failure of a single module on the system can be alleviated, the coupling degree of the functional module can be reduced, and the flexibility for controlling the system can be improved; meanwhile, the time sequence flow operation and fault protection can be a