Adhensive sheet

The invention provides an adhensive sheet capable of preventing grinding water and / or griding chips from intruding between the adhesive sheet and a semiconductor wafer when being attached to the semiconductor wafer and provided for griding operation carried out to the back side of the semiconducto...

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Bibliographic Details
Main Authors MIKI MORITA, KATSUTOSHI KAMEI, TOMOKAZU TAKAHASHI, SATOSHI HONDA
Format Patent
LanguageChinese
English
Published 17.09.2014
Subjects
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