Micromechanical relay with hybrid actuator

PCT No. PCT/DE94/00152 Sec. 371 Date Aug. 17, 1995 Sec. 102(e) Date Aug. 17, 1995 PCT Filed Feb. 14, 1994 PCT Pub. No. WO94/19819 PCT Pub. Date Aug. 1, 1994A micromechanical relay is provided having a cantilevered armature (53) which is etched out from an armature substrate (52). The armature is in...

Full description

Saved in:
Bibliographic Details
Main Authors H.-J. GEVATTER, L. KIESEWETTER, J. SCHIMKAT
Format Patent
LanguageEnglish
Published 30.09.1998
Edition6
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SWITCHES
ELECTRICITY
EMERGENCY PROTECTIVE DEVICES
RELAYS
SELECTORS
Online AccessGet full text

Cover

More Information
Summary:PCT No. PCT/DE94/00152 Sec. 371 Date Aug. 17, 1995 Sec. 102(e) Date Aug. 17, 1995 PCT Filed Feb. 14, 1994 PCT Pub. No. WO94/19819 PCT Pub. Date Aug. 1, 1994A micromechanical relay is provided having a cantilevered armature (53) which is etched out from an armature substrate (52). The armature is in the form of a tongue, is elastically connected to the armature substrate, and forms an electrostatic drive with a base electrode (58) of a base substrate (51) located underneath. In addition, a piezo-layer (60) is provided on the armature (53). The piezo-layer (60) acts as a bending transducer and forms a supplemental actuator for a quick response time. When a voltage is applied to the electrodes of the armature (53), base substrate (51) and piezo-layer (60), the armature is attracted toward the base substrate and then rests over a large area on the base, closing at least one contact (55, 56). The different characteristics of the electrostatic actuator, on the one hand, and of the piezo-drive, on the other hand, are complementarily combined to provide a strong attraction force at the start of the armature movement, and a strong contact force is produced after the armature has been attracted.
Bibliography:Application Number: CN19941091220