Vacuum degree measurement device for vacuum coating equipment

• Main Authors: MENG LIANG, ZHAO ZIMING, CHEN GUANBI, LAI WENBO, LI SHENG, HUANG SHIREN, REN CHANGBAO, ZENG ZHAOLONG
• Format: Patent
• Language: Chinese; English
• Published: 20.08.2014
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention relates to a vacuum degree measurement device for vacuum coating equipment. The device comprises a vacuum gauge and a switch valve. The switch valve is mounted in a vacuum chamber of the vacuum coating equipment and is connected to the vacuum gauge. When the switch valve is opened, the vacuum chamber and the vacuum gauge are mutually communicated, so that the vacuum gauge can convert the vacuum degree in the vacuum chamber by measuring the physical properties of gas. When the switch valve is closed, the vacuum chamber and the vacuum gauge are not communicated with each other, so that the contact opportunities of the vacuum gauge to a chemical corrosion gas can be reduced, thus reaching the purposes of prolonging the repair cycle and the service life. Meanwhile, the device is convenient for repair and operation.