Light modulator with four-layer graphene structure
The invention discloses a light modulator with a four-layer graphene structure and belongs to the field of photoelectronic techniques. The light modulator comprises an SOI light guide, a first ridge part and a second ridge part overlapping the first ridge part are arranged above a semiconductor ligh...
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Main Authors | , , , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
02.07.2014
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Subjects | |
Online Access | Get full text |
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Summary: | The invention discloses a light modulator with a four-layer graphene structure and belongs to the field of photoelectronic techniques. The light modulator comprises an SOI light guide, a first ridge part and a second ridge part overlapping the first ridge part are arranged above a semiconductor light guide layer of the SOI light guide, two graphene layers are arranged between the semiconductor light guide layer and the first ridge part, another two graphene layers are arranged between the first ridge part and the second first ridge part, and all the functional layers are isolated from one another through isolation media; one graphene layer between the semiconductor light guide layer and the first ridge part is connected with one graphene layer between the first ridge part and the second first ridge part through one metal electrode, and the other graphene layer between the semiconductor light guide layer and the first ridge part is connected with the other graphene layer between the first ridge part and the se |
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Bibliography: | Application Number: CN20141163464 |