On-chip decoupling capacitor, integrated chip, and method of manufacturing same
The present invention relates to an on-chip decoupling capacitor, an integrated chip, and a method of manufacturing the same. An on-chip decoupling capacitor is disclosed. One or more carbon nanotubes are coupled to a first electrode of the capacitor. A dielectric skin is formed on the one or more c...
Saved in:
Main Authors | , , , |
---|---|
Format | Patent |
Language | Chinese English |
Published |
11.06.2014
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | The present invention relates to an on-chip decoupling capacitor, an integrated chip, and a method of manufacturing the same. An on-chip decoupling capacitor is disclosed. One or more carbon nanotubes are coupled to a first electrode of the capacitor. A dielectric skin is formed on the one or more carbon nanotubes. A metal coating is formed on the dielectric skin. The dielectric skin is configured to electrically isolate the one or more carbon nanotubes from the metal coating. |
---|---|
Bibliography: | Application Number: CN201310594462 |