Hypersensitized Fe-Y-B (Ferrum-Yttrium-Boron) metal film and preparation method thereof
The invention discloses a hypersensitized Fe-Y-B (Ferrum-Yttrium-Boron) metal film and a preparation method of the hypersensitized Fe-Y-B metal film. The hypersensitized Fe-Y-B metal film is prepared from the following ingredients: 67-73at.% of Fe, 7-11at.% of Y and 14-20at.% of B, and the hypersens...
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Main Authors | , , , , |
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Format | Patent |
Language | Chinese English |
Published |
07.05.2014
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Subjects | |
Online Access | Get full text |
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Summary: | The invention discloses a hypersensitized Fe-Y-B (Ferrum-Yttrium-Boron) metal film and a preparation method of the hypersensitized Fe-Y-B metal film. The hypersensitized Fe-Y-B metal film is prepared from the following ingredients: 67-73at.% of Fe, 7-11at.% of Y and 14-20at.% of B, and the hypersensitized Fe-Y-B metal film is in an amorphous state. The preparation method comprises the steps of synthesizing Fe, Y and B into a target material and placing at a target position of multi-target magnetron sputtering coating equipment in a vacuum environment, vacuumizing a cavity, charging Ar2, regulating the pressure inside the cavity and carrying out pre-sputtering; then carrying out sputtering, and taking out a silicon single-sided polished section to obtain the Fe-Y-B metal film. The Fe-Y-B metal film is in the amorphous state, adopts a longitudinal driving mode, has hypersensitized magneto-impedance effect on a weak field and can be used for fabricating a magnetic sensor. |
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Bibliography: | Application Number: CN2014139013 |