Hypersensitized Fe-Y-B (Ferrum-Yttrium-Boron) metal film and preparation method thereof

• Main Authors: JIANG JIANZHONG, CAO QINGPING, LIU SUYA, WANG XIAODONG, ZHANG DONGXIAN
• Format: Patent
• Language: Chinese; English
• Published: 07.05.2014
• Subjects: ALLOYS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; FERROUS OR NON-FERROUS ALLOYS; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TREATMENT OF ALLOYS OR NON-FERROUS METALS

The invention discloses a hypersensitized Fe-Y-B (Ferrum-Yttrium-Boron) metal film and a preparation method of the hypersensitized Fe-Y-B metal film. The hypersensitized Fe-Y-B metal film is prepared from the following ingredients: 67-73at.% of Fe, 7-11at.% of Y and 14-20at.% of B, and the hypersensitized Fe-Y-B metal film is in an amorphous state. The preparation method comprises the steps of synthesizing Fe, Y and B into a target material and placing at a target position of multi-target magnetron sputtering coating equipment in a vacuum environment, vacuumizing a cavity, charging Ar2, regulating the pressure inside the cavity and carrying out pre-sputtering; then carrying out sputtering, and taking out a silicon single-sided polished section to obtain the Fe-Y-B metal film. The Fe-Y-B metal film is in the amorphous state, adopts a longitudinal driving mode, has hypersensitized magneto-impedance effect on a weak field and can be used for fabricating a magnetic sensor.