Diamond semiconductor system and method
Disclosed herein is a new and improved system and method for fabricating diamond semiconductors. The system may include a diamond material (200) having n-type donor atoms (306) and a diamond lattice (304), wherein.16% of the donor atoms (306) contribute conduction electrons with mobility greater tha...
Saved in:
Main Author | |
---|---|
Format | Patent |
Language | Chinese English |
Published |
09.04.2014
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | Disclosed herein is a new and improved system and method for fabricating diamond semiconductors. The system may include a diamond material (200) having n-type donor atoms (306) and a diamond lattice (304), wherein.16% of the donor atoms (306) contribute conduction electrons with mobility greater than 770 cm2/Vs to the diamond lattice (304) at 100 kPa and 300K. The method (100) of fabricating diamond semiconductors may include the steps of selecting a diamond material (200) having a diamond lattice (304); introducing a minimal amount of acceptor dopant atoms to the diamond lattice (304) to create ion tracks; introducing substitutional dopant atoms to the diamond lattice (304) through the ion tracks; and annealing the diamond lattice (304). |
---|---|
Bibliography: | Application Number: CN201280038078 |