Diamond semiconductor system and method

Disclosed herein is a new and improved system and method for fabricating diamond semiconductors. The system may include a diamond material (200) having n-type donor atoms (306) and a diamond lattice (304), wherein.16% of the donor atoms (306) contribute conduction electrons with mobility greater tha...

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Bibliographic Details
Main Author KHAN ADAM
Format Patent
LanguageChinese
English
Published 09.04.2014
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Summary:Disclosed herein is a new and improved system and method for fabricating diamond semiconductors. The system may include a diamond material (200) having n-type donor atoms (306) and a diamond lattice (304), wherein.16% of the donor atoms (306) contribute conduction electrons with mobility greater than 770 cm2/Vs to the diamond lattice (304) at 100 kPa and 300K. The method (100) of fabricating diamond semiconductors may include the steps of selecting a diamond material (200) having a diamond lattice (304); introducing a minimal amount of acceptor dopant atoms to the diamond lattice (304) to create ion tracks; introducing substitutional dopant atoms to the diamond lattice (304) through the ion tracks; and annealing the diamond lattice (304).
Bibliography:Application Number: CN201280038078