Piezoelectric type micro acceleration sensor

• Main Authors: YAO MINGQIU, TAO FENGGANG, SU WEI, SUN YUANCHENG, TANG BIN, QU BINGBING
• Format: Patent
• Language: Chinese; English
• Published: 26.02.2014
• Subjects: INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT; MEASURING; MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK; PHYSICS; TESTING

The invention provides a piezoelectric type micro acceleration sensor. The sensor comprises a sensitive chip and an upper glass plate and a lower glass plate. The sensitive chip adopts an annular structure which is symmetrical in structure. The sensitive chip comprises eight upper electrodes, eight lower electrodes, eight piezoelectric layers, a supporting membrane and a mass block in total. The eight lower electrodes are arranged on the supporting membrane. The eight piezoelectric layers are arranged on the lower electrodes. The eight upper electrodes are arranged on the piezoelectric layers. The mass block is suspended below the lower electrodes and fixedly connected with the supporting membrane. The mass block is suspended below the supporting membrane so that a movable part of the sensitive chip is formed. Circular rings formed by the electrodes and the piezoelectric layers respectively are concentric with the mass block. The sensitive chip and the upper glass plate and the lower glass plate are respectiv