Method and device for non-contact measuring surfaces
A slit (m) is projected onto an object surface in which reference point (X1) is in a horizontal axis (x) closest to best in focus position (P). One image of a field of view area (F) is acquired after reflection of light comprising said reference point (X1). Position (Z1) of the object (300) in a ver...
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Main Authors | , , , |
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Format | Patent |
Language | Chinese English |
Published |
29.01.2014
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Subjects | |
Online Access | Get full text |
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Summary: | A slit (m) is projected onto an object surface in which reference point (X1) is in a horizontal axis (x) closest to best in focus position (P). One image of a field of view area (F) is acquired after reflection of light comprising said reference point (X1). Position (Z1) of the object (300) in a vertical axis (z) is determined. Images of respective field of view areas (F) are acquired after reflection of light having reference points (X2, X3... Xn) by simultaneously moving the object (300) along axis (z) to maintain reference points (X2, X3... Xn) closest to best in focus position (P). Positions (Z2, Z3... Zn) in which images were acquired are determined. The best in focus position (P) along horizontal axis (x) is determined for each image. A correction differential (delta 1, delta 2...delta n) between best in focus position (P) and reference points (X1, X2.. Xn) is calculated. |
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Bibliography: | Application Number: CN2011871004 |