Ultraviolet light generating target, electron-beam-excited ultraviolet light source, and method for producing ultraviolet light generating target

An ultraviolet light generating target 20 includes a substrate 21 made of sapphire, quartz or rock crystal; and a Pr:LuAG polycrystalline film 22, provided on the substrate 21, that generates ultraviolet light upon receiving an electron beam. By using a Pr:LuAG polycrystal as the target, the ultravi...

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Main Authors KAWAI KOJI, FUKUYO FUMITSUGU, ICHIKAWA NORIO, CHU SHUCHENG, SUZUKI TAKASHI, HATTORI TAKEAKI, HONDA YOSHINORI
Format Patent
LanguageEnglish
Published 10.06.2015
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Summary:An ultraviolet light generating target 20 includes a substrate 21 made of sapphire, quartz or rock crystal; and a Pr:LuAG polycrystalline film 22, provided on the substrate 21, that generates ultraviolet light upon receiving an electron beam. By using a Pr:LuAG polycrystal as the target, the ultraviolet light generating efficiency can be increased more remarkably than when a Pr:LuAG single crystal film is used.
Bibliography:Application Number: CN201280020390