Wafer exchange device and hand for wafer support

Provided is a wafer exchange device that is compact and has superior accessibility. This wafer exchange device is provided with first and second hands (10, 20), a first lifting means (30), a housing (40), horizontal moving means (50), and a second lifting means (60). The first and second hands (10,...

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Main Authors YAMAZOE KATSUHIRO, TSUKIMOTO HIROAKI, NISHIJIMA YOSHIKI, IMAI SHINICHI, SAKATA KOSUKE, MATSUKAWA KEIICHI, YAMABE HIROSHI, OBATA HITOSHI
Format Patent
LanguageChinese
English
Published 01.01.2014
Subjects
BASIC ELECTRIC ELEMENTS
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HAND TOOLS
MANIPULATORS
PERFORMING OPERATIONS
PORTABLE POWER-DRIVEN TOOLS
SEMICONDUCTOR DEVICES
TRANSPORTING
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Summary:Provided is a wafer exchange device that is compact and has superior accessibility. This wafer exchange device is provided with first and second hands (10, 20), a first lifting means (30), a housing (40), horizontal moving means (50), and a second lifting means (60). The first and second hands (10, 20) are formed substantially symmetrically in a left and right divided form and support a wafer (100). The first lifting means (30) lifts the second hand (20). The housing (40) has the first lifting means (30) installed therein and also supports the first hand (10) in an unchangeably vertical position and the second hand (20) liftably. The horizontal moving means (50) moves the housing (40) horizontally. The second lifting means (60) lifts the housing (40).
Bibliography:Application Number: CN201280018577