Dual-motor optical element axial adjustment device

• Main Authors: PENG HAIFENG, SUN ZHEN, HUA YANGYANG, GUO KANG, GONG YAN, NI MINGYANG
• Format: Patent
• Language: Chinese; English
• Published: 25.12.2013
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

The invention provides a dual-motor optical element axial adjustment device, relates to the technical field of deep ultraviolet projection photoetching objective lens structural design and adjustment, and aims to solve the problems that an existing optical element aligning device is provided with a large number of actuators and is complex in mechanism and high in processing difficulty. The dual-motor optical element axial adjustment device comprises four capacitive sensors, an optical frame, eight connection screws, a smooth driving block and two piezoelectric actuators. The four capacitive sensors are placed parallel to the upper surface of the optical frame, are evenly distributed along the upper edge of the optical frame, and correspond to the midpoints of all right-angle sides of the smooth driving block. The optical frame and the smooth driving block are fixed through the connection screws. The two piezoelectric actuators are arranged at the diagonal positions of the smooth driving block respectively. An