Substrate storage rack

The invention provides a substrate storage rack, comprising a hollow rack body, wherein the rack body is provided with a first side face, a second side face, a third side face and a fourth side face, wherein the interior of the rack body is sequentially provided with a plurality of substrate placing...

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Bibliographic Details
Main Authors YAO JIANGBO, LI CHUNLIANG
Format Patent
LanguageChinese
English
Published 18.12.2013
Subjects
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Summary:The invention provides a substrate storage rack, comprising a hollow rack body, wherein the rack body is provided with a first side face, a second side face, a third side face and a fourth side face, wherein the interior of the rack body is sequentially provided with a plurality of substrate placing layers at intervals along the vertical direction, and each substrate placing layer comprises a first support connected with the rack body and arranged at the second side face, a first supporting rod arranged on the first support along the horizontal direction and extends into the interior of the rack body, a second support connected with the rack body and arranged at the fourth side face, and a second supporting rod arranged on the second support along the horizontal direction and extends into the interior of the rack body. Through arranging the first supporting rod and the second supporting rod on the second side face and the fourth side face respectively, storage of substrates in the rack body is ensured, and si
Bibliography:Application Number: CN201310408422