Method for optically scanning an edge in or on a surface region

The invention relates to a method for ascertaining the position of an edge in an object surface region of interest by optical scanning. For this purpose, the reflectivity of the object surface region is evaluated. Light is emitted onto the object surface region under different illumination condition...

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Bibliographic Details
Main Authors NEHSE UWE, BUECHNER MARCO
Format Patent
LanguageChinese
English
Published 23.10.2013
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Summary:The invention relates to a method for ascertaining the position of an edge in an object surface region of interest by optical scanning. For this purpose, the reflectivity of the object surface region is evaluated. Light is emitted onto the object surface region under different illumination conditions, in particular different light incidence directions, and in each illumination condition a sequence S1 to Sn of camera images B is recorded. Each camera image B of a sequence S1 to Sn is recorded at another illumination intensity I. Subsequently in each case one reflectivity image R1 to Rn is produced from a plurality of or from all camera images B of a sequence S1 to Sn. Thereafter, a resulting reflectivity image E is produced from a plurality of or from all reflectivity images R1 to Rn by weighted addition, in which resulting reflectivity image E the position of an edge in or on the object surface region of interest is determined with subpixel accuracy by applying at least one edge location criterion.
Bibliography:Application Number: CN201180046030