Mass flow controller with onboard diagnostics, prognostics, and data logging
A mass flow controller and a method for operating the same are disclosed. The mass flow controller includes a mass flow control system to control the mass flow rate of a fluid, and a data logging component that obtains snapshots of condition-specific-data for each of a plurality of reoccurring condi...
Saved in:
Main Authors | , , , , , , |
---|---|
Format | Patent |
Language | Chinese English |
Published |
25.09.2013
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | A mass flow controller and a method for operating the same are disclosed. The mass flow controller includes a mass flow control system to control the mass flow rate of a fluid, and a data logging component that obtains snapshots of condition-specific-data for each of a plurality of reoccurring condition types, and reduces each snapshot of condition-specific-data to functional parameter values that characterize each snapshot of condition-specific-data, and the data logging component generates statistical values that are stored in a short term data store that characterize multiple functional parameter values that are obtained during each separate occurrence of a specific condition type. A diagnostics component diagnoses failures using current functional parameter values and the statistical values stored in the short-term memory, and a prognostics component predicts failures based upon a collection of data sets that are stored in the long-term memory. |
---|---|
Bibliography: | Application Number: CN2012806147 |