Detection method for chlorinity in oxide layer

A detection method for chlorinity in an oxide layer is provided by the invention, and comprises the following steps: providing a sample comprising the oxide layer, placing the sample in a total reflection X-ray fluorescence spectrometer, determining test points on the oxide layer, and detecting the...

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Bibliographic Details
Main Authors ZHANG LINGYUE, JIANG BO, GUAN BAOHUI
Format Patent
LanguageChinese
English
Published 04.09.2013
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:A detection method for chlorinity in an oxide layer is provided by the invention, and comprises the following steps: providing a sample comprising the oxide layer, placing the sample in a total reflection X-ray fluorescence spectrometer, determining test points on the oxide layer, and detecting the chlorinity of the test points through the total reflection X-ray fluorescence spectrometer. In the detection method for the chlorinity in the oxide layer, the chlorinity in the oxide layer is detected by the total reflection X-ray fluorescence spectrometer (TXRF), and therefore the detection time is short and the detection cost is low.
Bibliography:Application Number: CN20131153806