Screen printing device and screen printing method

The present invention is aimed at providing a screen printing device and a screen printing method such that, in a configuration which horizontally moves an imaging unit having two imaging optical axes for imaging a substrate and a mask plate as imaging subjects, the quality of substrate positioning...

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Bibliographic Details
Main Authors YAZAWA TAKASHI, ABE SEIKOU
Format Patent
LanguageChinese
English
Published 21.08.2013
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Summary:The present invention is aimed at providing a screen printing device and a screen printing method such that, in a configuration which horizontally moves an imaging unit having two imaging optical axes for imaging a substrate and a mask plate as imaging subjects, the quality of substrate positioning accuracy can be conveniently confirmed in continuing production processes. The optical axes calibration processing step of detecting relative positions between the imaging optical axes in the horizontal direction, and a surface correction data preparation processing step of detecting a localized position misregistration in the imaging optical axes caused by the movement of the imaging unit, are performed prior to a mark imaging step that is performed with the aim of position detection of fiducial marks for positioning of the substrate and mask, and a pre-production accuracy evaluation step for evaluating substrate positioning accuracy using a validation substrate and mask prior to starting production, and a post-pr
Bibliography:Application Number: CN201180061059