Molybdenum-tungsten alloy sputtering target material for flat panel display and preparation method thereof

• Main Authors: ZHAO WENPU, GAO JIANJIE
• Format: Patent
• Language: Chinese; English
• Published: 21.08.2013
• Subjects: ALLOYS; CASTING; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; FERROUS OR NON-FERROUS ALLOYS; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MAKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVINGMATERIAL; METALLURGY; PERFORMING OPERATIONS; POWDER METALLURGY; PUNCHING METAL; ROLLING OF METAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING; TREATMENT OF ALLOYS OR NON-FERROUS METALS; WORKING METALLIC POWDER

The invention relates to a molybdenum-tungsten alloy plane sputtering target material, and in particular relates to a molybdenum-tungsten alloy sputtering target material for a flat panel display and a preparation method thereof. The target material is prepared from 80-96.5% of molybdenum powder and 3.5-20% of tungsten powder. The preparation method comprises the steps of material preparation, powder blending, mechanical alloying, die filling, isostatic cool pressing, sintering, hot rolling, vacuum annealing and mechanical processing. According to the molybdenum-tungsten alloy sputtering target material and the preparation method thereof provided by the invention, the preparation technology is simple, the requirements for equipment are not high, the investment cost is lower, the prepared target material has good density, and the relative density exceeds 99%; meanwhile, through the technology provided by the invention, the molybdenum-tungsten alloy grain is refined, and the grain structure is optimized; and wh