Non-refrigerating film infrared focal plane array detector structure and production method thereof

• Main Authors: CHEN XIAOYANG, WANG XIAOFENG, XU ZUNPING, YANG CHUNLI, ZHANG XIAOSHAN, HU XU, YU PING, ZHU JIANGUO
• Format: Patent
• Language: Chinese; English
• Published: 22.05.2013
• Subjects: BASIC ELECTRIC ELEMENTS; CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS; COLORIMETRY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT; MEASURING; PHYSICS; RADIATION PYROMETRY; SEMICONDUCTOR DEVICES; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE; TESTING

A non-refrigerating film infrared focal plane array detector structure comprises a first substrate provided with reading circuits, and a second substrate provided with thermal isolation microbridge arrays and sensitive element arrays. The first substrate and the second substrate are integrally bonded. The etched second substrate serves as a pier for each thermal isolation microbridge unit in the thermal isolation microbridge arrays, and a support layer tightly attached to the top of the pier serves as a deck. The deck of each thermal isolation microbridge unit is provided with one sensitive element array. Each sensitive element array is electrically connected with the corresponding reading circuit of the first substrate through a lead electrode. A production method of the non-refrigerating film infrared focal plane array detector structure includes: preparing a pattern on a bonding surface of the first substrate, preparing the support layer, preparing the sensitive element arrays, protecting the front side of