Automatic bonding device and method for cilia of MEMS vector hydrophone

• Main Authors: ZHANG WENDONG, PAN MINGQIANG, HUANG HAIBO, WANG ZHENHUA, CHEN TAO, LIU JIZHU, WANG YANGJUN, SUN LINING, CHEN LIGUO, WANG PENGBO, RU CHANGHAI, ZHANG GUOJUN
• Format: Patent
• Language: Chinese; English
• Published: 10.04.2013
• Subjects: MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES; MEASURING; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PHYSICS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; TESTING; TRANSPORTING

The invention discloses an automatic bonding device and a method for cilia of an MEMS (micro-electromechanical system) vector hydrophone. The bonding device comprises a cutting clamp system, a cutting drive system, a cilium delivery system, a chip carrier movement system, an ultraviolet curing machine, an ultraviolet light machine irradiating head and an electric control cabinet. According to the automatic bonding device and the method for the cilia of the MEMS vector hydrophone, gluewater used in bonding is UV (ultraviolet) glue; the quantity of the gluewater is easy to control; the gluewater is not dried in the air easily; and a rapid solidification effect is achieved through irradiation of the ultraviolet curing machine. With the adoption of the device and the method, the bonding efficiency and the bonding quality of the cilia can be improved greatly.