Device and method for adjusting ring cavity of excimer laser device

• Main Authors: LU PEIXIANG, ZHU JIANPING, XU YONGYUE, ZUO DULUO, WANG XINBING, HU YAOWEN, HU SHOUYAN
• Format: Patent
• Language: Chinese; English
• Published: 27.03.2013
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES USING STIMULATED EMISSION; ELECTRICITY

The invention belongs to the technical field of excimer lasers and provides a device and a method for adjusting a ring cavity of an excimer laser device. The device comprises a reference light source, reflecting mirrors, a small-hole diaphragm and a screen, wherein the reference light source is used for producing reference light beams for calibration. The method is particularly applicable to a ring cavity adjustment reference light and excimer laser coaxial method. According to the method, a discharging chamber optical axis position can be determined with fluorescent light spot centers of a discharging chamber outside two sealing windows serving as references, and two reflecting mirrors inside the ring cavity are adjusted to enable reference light to circle the ring cavity by one circle and then coincide with a far point light spot at a near point with secondary reflection light of the reference light which just enters a coupling mirror, so that a cavity body of the ring cavity of the excimer laser device can