Method and apparatus for applying forces perpendicular to cantilever beam

• Main Authors: ZHAO DANQI, WANG WEI, TIAN DAYU, LIU PENG, LI TING, HE JUN, ZHANG DACHENG, LUO KUI, YANG FANG
• Format: Patent
• Language: Chinese; English
• Published: 13.03.2013
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The invention relates to a method and an apparatus for applying forces perpendicular to a cantilever beam. The method comprises applying load force to an on-sheet mechanical microprobe with a curved-surface probe through a probe on a probe station; applying forces to the cantilever beam through the curved-surface probe by the on-sheet mechanical microprobe, and meanwhile rotating the on-sheet mechanical microprobe so that the forces to the cantilever beam are always perpendicular to the cantilever beam during a bending process. According to the invention, during the process of applying the forces to the detected cantilever beam, elastic forces in the direction of the cantilever beam are not generated, and frictional forces are either not generated; and due to a buffer effect of the mechanical microprobe, the application of the load force is relatively stable and the measure results are relatively accurate.