Cleaning solution composition for electronic material
The present invention relates to a cleaning solution composition comprising, in terms of the total weight of the composition, 0.05 to 20 wt % of a basic compound, 0.1 to 40 wt % of a water-soluble polar organic solvent, 0.01 to 10 wt % of an organophosphorous compound, 0.01 to 10 wt % of a polycarbo...
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Main Authors | , , , |
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Format | Patent |
Language | Chinese English |
Published |
19.12.2012
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Subjects | |
Online Access | Get full text |
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Summary: | The present invention relates to a cleaning solution composition comprising, in terms of the total weight of the composition, 0.05 to 20 wt % of a basic compound, 0.1 to 40 wt % of a water-soluble polar organic solvent, 0.01 to 10 wt % of an organophosphorous compound, 0.01 to 10 wt % of a polycarboxylic-acid-based copolymer, 0.001 to 10 wt % of an alkanolamine salt, 0.001 to 10 wt % of an azole-based compound, with the remainder being water. |
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Bibliography: | Application Number: CN201180018645 |