Cleaning solution composition for electronic material

The present invention relates to a cleaning solution composition comprising, in terms of the total weight of the composition, 0.05 to 20 wt % of a basic compound, 0.1 to 40 wt % of a water-soluble polar organic solvent, 0.01 to 10 wt % of an organophosphorous compound, 0.01 to 10 wt % of a polycarbo...

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Bibliographic Details
Main Authors KIM BYOUNG-MOOK, BANG SOON-HONG, YOON HYO-JOONG, HONG HUN-PYO
Format Patent
LanguageChinese
English
Published 19.12.2012
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Summary:The present invention relates to a cleaning solution composition comprising, in terms of the total weight of the composition, 0.05 to 20 wt % of a basic compound, 0.1 to 40 wt % of a water-soluble polar organic solvent, 0.01 to 10 wt % of an organophosphorous compound, 0.01 to 10 wt % of a polycarboxylic-acid-based copolymer, 0.001 to 10 wt % of an alkanolamine salt, 0.001 to 10 wt % of an azole-based compound, with the remainder being water.
Bibliography:Application Number: CN201180018645