Precision spacing for stacked wafer assemblies

An assembly (200) including a first wafer (202), a second wafer (202), a spacing wafer (204) configured to be positioned between the first wafer and the second wafer, and a plurality of spacing elements (216) configured to be positioned within the spacing wafer and to contact the first wafer and the...

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Bibliographic Details
Main Author MARGALIT MORDEHAI
Format Patent
LanguageChinese
English
Published 14.11.2012
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Summary:An assembly (200) including a first wafer (202), a second wafer (202), a spacing wafer (204) configured to be positioned between the first wafer and the second wafer, and a plurality of spacing elements (216) configured to be positioned within the spacing wafer and to contact the first wafer and the second wafer, the spacing elements sized to define a spacing distance between the first wafer and the second wafer. A method for mounting a lens element (502) at a focus distance from a base layer (508) is also disclosed. The method comprises: affixing a plurality of spacing elements (504) to the lens element; applying a quantity of deformable material (506) to each of the plurality of spacing elements; applying a pressing force to the lens assembly and applying heat to the deformable material until a distance between the lens element and the base layer equals the focus distance.
Bibliography:Application Number: CN2011811134