Measurement system and method for measuring height of surface of micro object on basis of digital fringe projection technology

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Bibliographic Details
Main Authors ZUO CHAO, SUI XIUBAO, CHEN QIAN, FENG SHIJIE, HE WEIJI, GU GUOHUA, LI RUBIN, FENG FANGXIAOYU, QIAN WEIXIAN, SHEN GUOCHEN, REN JIANLE
Format Patent
LanguageEnglish
Published 22.04.2015
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Bibliography:Application Number: CN20121276379