System and method for assessing inhomogeneous deformations in multilayer plates

The invention relates to a method for assessing inhomogeneous deformations in a first plate (110), the first plate being adhered by molecular bonding to a second plate (120). Said method includes a step of recording a plurality of measurement points, each one of the measurement points being locally...

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Bibliographic Details
Main Authors MARINIER LAURENT, BROEKAART MARCEL, CASTEX ARNAUD
Format Patent
LanguageChinese
English
Published 17.10.2012
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MATERIALS THEREFOR
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
TESTING
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Summary:The invention relates to a method for assessing inhomogeneous deformations in a first plate (110), the first plate being adhered by molecular bonding to a second plate (120). Said method includes a step of recording a plurality of measurement points, each one of the measurement points being locally representative of the level of the surface of the first plate; a step of defining a surface profile of the first plate passing through a plurality of the measurement points; a step of processing the surface profile of the first plate in order to define a typical magnitude thereof; and a step of assessing a level of inhomogeneous deformations in the first plate according to the typical magnitude. The invention further relates to a device (147) for assessing such inhomogeneous deformations.
Bibliography:Application Number: CN2011807676