Push rod-type wafer clamping device which extends with cylinder

• Main Authors: ZHU YU, YU DONGDONG, WANG JINSONG, CUI LEQING, ZHANG MING, LI XIN, XU DENGFENG, YANG KAIMING, HU JINCHUN, YIN WENSHENG, MU HAIHUA
• Format: Patent
• Language: Chinese; English
• Published: 17.10.2012
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention relates to a push rod-type wafer clamping device which extends with a cylinder, and the push rod-type wafer clamping device is mainly used in semi-conductor wafer processing equipment. The device comprises a film V-shaped tray; both sides of the front end of the tray are respectively provided with a fixed element; four raised support elements are arranged on the tray, the four raised support elements are arranged on a circumference which is concentric with a wafer, and the connecting line of two diagonal raised support elements penetrates through the circle center of the wafer; the tail end of the tray is provided with a pneumatic device, and the pneumatic device is connected with one end of a push rod; the other end of the push rod is connected with an elastic element; fixed pieces are symmetrically arranged on both sides of the elastic element; and each fixed piece is provided with a movable clamp. According to the device, a wafer is clamped between the fixed elements and the movable clamp, so