Adjusting device for micro-motion with Z, tip and tilt degrees of freedom of optical element

• Main Authors: SUN ZHEN, GONG YAN, ZHAO LEI, NI MINGYANG
• Format: Patent
• Language: Chinese; English
• Published: 20.08.2014
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

The invention discloses an adjusting device for micro-motion with Z, tip and tilt degrees of freedom of an optical element, and belongs to the field of assembly and adjustment compensation for deep-ultraviolet projection lithographic objective lenses. The adjusting device aims to realize high-precision adjustment for the optical element with the Z, tip and tilt degrees of freedom, and comprises a lens frame, a lens barrel, three motion branched chains and three pairs of double-capacitance sensors, the lens frame is connected with the lens barrel by the three motion branched chains, each motion branched chain consists of a first flexible universal hinge, a driver and a second flexible universal hinge, each driver is positioned below the corresponding first flexible universal hinge, each second flexible universal hinge is positioned below the corresponding driver, the three motion branched chains are peripherally and uniformly distributed and are separated from each other by 120-degree angles, upper electrode p