Positioning alignment apparatus of double-side driving workpiece platform without being connected by cross beam

• Main Authors: ZHU YU, YU DONGDONG, WANG JINSONG, CUI LEQING, ZHANG MING, LI XIN, XU DENGFENG, YANG KAIMING, HU JINCHUN, YIN WENSHENG, MU HAIHUA
• Format: Patent
• Language: Chinese; English
• Published: 03.10.2012
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

The invention relates to a positioning alignment apparatus of a double-side driving workpiece platform without being connected by a cross beam, belonging to the technical field of ultraprecision machining and detection equipment. The positioning alignment apparatus comprises two same positioning assemblies, and each positioning assembly comprises a telescopic unit, a push rod, a positioning groove and a position sensor, wherein the position sensor is used for the position detection of the double-side driving workpiece platform and supplies a positioning executing signal. The invention solves the problem that the double-side driving workpiece platform without being connected by the cross beam shifts along a Y shaft direction without being acted by driving force, prevents the structure loaded on the double-side driving workpiece platform from being damaged due to the desynchrony of the double-side driving workpiece platform and also solves the problem that the double-side driving workpiece platform is aligned o