Process for purifying chlorosilanes by distillation

Distillative purification of chlorosilane comprises providing a boron-containing mixture of chlorosilane comprising trichlorosilane (TCS), dichlorosilane (DCS) and silicon tetrachloride (STC) and distillatively purifying the mixture of chlorosilane in several distillation columns, where low-boiling...

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Bibliographic Details
Main Authors HAECKL WALTER DR, PROCHASKA JAN DR, PAETZOLD UWE DR
Format Patent
LanguageChinese
English
Published 08.08.2012
Subjects
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
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Summary:Distillative purification of chlorosilane comprises providing a boron-containing mixture of chlorosilane comprising trichlorosilane (TCS), dichlorosilane (DCS) and silicon tetrachloride (STC) and distillatively purifying the mixture of chlorosilane in several distillation columns, where low-boiling boron compounds are branched off by main streams containing borane-enriched DCS and higher boiling boron compounds are branched off by a borane-enriched bottom stream containing high boilers from the distillation columns.
Bibliography:Application Number: CN201210025073