Cleaning solution composition for substrate for preparation of flat panel display

• Main Authors: KIM SUNG-SIK, KIM BYOUNG-MOOK, BANG SOON-HONG, YOON HYO-JOONG
• Format: Patent
• Language: Chinese; English
• Published: 11.07.2012
• Subjects: ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES; APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CANDLES; CHEMISTRY; CINEMATOGRAPHY; DETERGENT COMPOSITIONS; DETERGENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; FATTY ACIDS THEREFROM; HOLOGRAPHY; MATERIALS THEREFOR; METALLURGY; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; RECOVERY OF GLYCEROL; RESIN SOAPS; SEMICONDUCTOR DEVICES; SOAP OR SOAP-MAKING; USE OF SINGLE SUBSTANCES AS DETERGENTS

The present invention relates to an aqueous cleaning solution composition comprising one or more kinds of compounds selected from a boric acid derivative, an organic phosphoric acid and salts thereof, used for cleaning the surface of a substrate during a manufacturing process of a flat panel display. The aqueous cleaning solution composition of the present invention has excellent removing power of the contamination due to organic materials or particles generated on a substrate during a manufacturing process of a flat panel display, and has excellent corrosion prevention of a metal interconnect formed on a substrate. In addition, the aqueous cleaning solution composition of the present invention contains a large amount of deionized water and thus can be easily handled and is environmentally advantageous.