Cleaning solution composition
The present invention relates to an aqueous cleaning solution composition for removing the contaminant formed in a channel portion of a thin film transition during a manufacturing process of a flat panel display (FPD), and a cleaning method using the same. The aqueous cleaning solution composition o...
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Main Authors | , , , |
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Format | Patent |
Language | Chinese English |
Published |
13.06.2012
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Subjects | |
Online Access | Get full text |
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