Cleaning solution composition

The present invention relates to an aqueous cleaning solution composition for removing the contaminant formed in a channel portion of a thin film transition during a manufacturing process of a flat panel display (FPD), and a cleaning method using the same. The aqueous cleaning solution composition o...

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Bibliographic Details
Main Authors KIM SUNG-SIK, BANG SOON-HONG, LEE SEUNG-YONG, YOON HYO-JOONG
Format Patent
LanguageChinese
English
Published 13.06.2012
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