Silicon micro-resonant mode pressure sensor based on differential motion structure with coupling beam

• Main Authors: SU YUANZHE, JIANG YIWEN, SUN DAOHENG, LV WENLONG, DU XIAOHUI, WANG LINGYUN
• Format: Patent
• Language: Chinese; English
• Published: 13.06.2012
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PHYSICS; TESTING; TRANSPORTING

The invention provides a silicon micro-resonant mode pressure sensor based on a differential motion structure with a coupling beam, relating to a sensor. The silicon micro-resonant mode pressure sensor is provided with a harmonic oscillator, a rectangular silicon island, a rectangular pressure sensitive diaphragm, a silicon frame and a lower layer of glass, wherein the harmonic oscillator is provided with supporting beams, the coupling beam, a movable comb exciting electrode, a movable comb detection electrode, a fixed comb exciting electrode, a fixed comb detection electrode and a vibration mass block; the rectangular pressure sensitive diaphragm is fixed in the silicon frame; the rectangular silicon island is arranged at the position where the stress deflection angle of the rectangular pressure sensitive diaphragm is maximum; the harmonic oscillator is suspended on the surface of the rectangular pressure sensitive diaphragm by the rectangular silicon island through the supporting beams and the supporting be