Manufacturing method of planar optical waveguide device with grating structure

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Bibliographic Details
Main Authors SAKUMA KEN, TEO HWEE GEE, GUAN NING, YU MINGBIN, LO GUO-QIANG, OGAWA KENSUKE, TAN YONG TSONG, GOI KAZUHIRO
Format Patent
LanguageChinese
English
Published 05.02.2014
Subjects
MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES
NANOTECHNOLOGY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PERFORMING OPERATIONS
PHYSICS
SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
TRANSPORTING
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Bibliography:Application Number: CN20098161036