Method for monitoring gate groove etching

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Bibliographic Details
Main Authors WEI KE, PENG MINGZENG, ZHENG YINGKUI, LIU XINYU, LIU GUOGUO
Format Patent
LanguageChinese
English
Published 25.12.2013
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Bibliography:Application Number: CN20101574009