Evaporation or sublimation method of evaporation material in vacuum evaporation unit, and crucible unit

• Main Author: KAMIKAWA KENJI
• Format: Patent
• Language: English
• Published: 14.01.2015
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PROBLEM TO BE SOLVED: To perform continuous operation for a long period of time while restraining the deterioration of a vapor deposition material.SOLUTION: A radiant heater 21 radiating a heating wave mainly using wavelengths of infrared rays is inserted in a heating wave transmissing tube 22 formed of a material transmissible of infrared rays, and is then arranged in a crucible holder 13. The surface of a vapor deposition material M in a crucible body 12 is irradiated with the heating wave from the radiant heater 21 to heat the surface and to evaporate or sublimate only the surface of the vapor deposition material M. Even when the evaporated or sublimated vapor deposition material M sticks on the surface of the heating wave transmissing tube 22 or on the inner surface of the crucible body 12 and the crucible holder 13, the stuck vapor deposition material is heated by the heating wave and again evaporated or sublimated.