Reparation method of tungsten titanium alloy target material used in semiconductor and solar sputtering target material industries
Saved in:
Main Authors | , , , , , |
---|---|
Format | Patent |
Language | Chinese English |
Published |
09.01.2013
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Bibliography: | Application Number: CN20111149666 |
---|