Optical element axial adjusting device with aligning function

The invention provides an optical element axial adjusting device with an aligning function and relates to the technical field of deep ultraviolet lithography objective lens design and debugging. By using the device, the problem that the radial error is caused in the axial adjustment of the tradition...

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Bibliographic Details
Main Authors GONG YAN, ZHAO LEI, ZHANG WEI, NI MINGYANG
Format Patent
LanguageChinese
English
Published 13.06.2012
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:The invention provides an optical element axial adjusting device with an aligning function and relates to the technical field of deep ultraviolet lithography objective lens design and debugging. By using the device, the problem that the radial error is caused in the axial adjustment of the traditional optical element axial adjusting device is solved. The axial adjusting device can be regarded as a lens cone unit of an objective lens integrally, wherein a lens base is placed into the lens cone through the precise matching of an axle hole; a sliding frame is arranged on an external cylindrical surface of the lens cone; the lens base is used for aligning a lens frame component; the sliding frame is connected with an internal lens frame component through guide nails; the sliding frame is pushed by three piezoelectric drivers at the same time, so as to drive the lens frame and an optical element to axially move forwards; a recovering force supporting the sliding frame to retreat is supplied by a spring; and when a
Bibliography:Application Number: CN201110127030