Adjustable vacuum sucker device for assembling and adjusting lens of photoetching machine

• Main Authors: GONG YAN, ZHAO LEI, ZHANG WEI, NI MINGYANG, ZHAO YANG
• Format: Patent
• Language: Chinese; English
• Published: 13.06.2012
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

The invention provides an adjustable vacuum sucker device for assembling and adjusting a lens of a photoetching machine and relates to the technical field of the manufacturing, assembly and adjustment of projection objective lens of deep ultraviolet photoetching machines. By the adjustable vacuum sucker device, the problem that lenses, lens barrels and lens frames of different dimensions cannot be reliably absorbed and transported in the process of processing and assembling photoetching projection objective lenses is solved. The adjustable vacuum sucker device comprises an adaptive joint, an upper cover, a shell, a worm wheel, a worm screw, an adjusting handle, shift pins, a connecting rod and rubber suction nozzles. The three shift pins which are circumferentially and uniformly distributed are driven to rotate through the meshing driving of the worm wheel and the worm screw; and the shift pins shift the connecting rod to make the centrosymmetrical three rubber suction nozzles synchronously moved from the cen