Fully symmetric miniature silicon resonant pressure sensor

• Main Authors: DU JIANG, ZOU JIANNAN, JIANG YIWEN, SUN DAOHENG, LV WENLONG, ZHANG CHI, WANG LINGYUN
• Format: Patent
• Language: Chinese; English
• Published: 24.08.2011
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PHYSICS; TESTING; TRANSPORTING

The invention relates to a pressure sensor, in particular to a fully symmetric miniature silicon resonant pressure sensor. The fully symmetric miniature silicon resonant pressure sensor is based on lateral drive and can solve the problem of nonlinear driving force in an upper and lower planar plate driving structure and the problem of coupling between the driving force and a pressure sensitive diaphragm. The pressure sensor is provided with a resonant structure, four frustum-shaped silicon islands, a square silicon pressure sensitive diaphragm, a silicon frame and a lower glass layer; the inside of the silicon frame and the square silicon pressure sensitive diaphragm are connected into a whole; the four frustum-shaped silicon islands are symmetrically arranged on the diagonals of the square silicon pressure sensitive diaphragm; the four sides of the four frustum-shaped silicon islands are parallel to the four sides of the square silicon pressure sensitive diaphragm; the four frustum-shaped silicon islands sus