Transmission electron microscope micro-gate and manufacturing method thereof

• Main Authors: LIU LIANG, QIAN LI, WANG YUQUAN, FENG CHEN, FAN LI
• Format: Patent
• Language: Chinese; English
• Published: 10.08.2011
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS

The invention relates to a transmission electron microscope micro-gate and a manufacturing method for the transmission electron microscope micro-gate. The transmission electron microscope micro-gate comprises a pure carbon grid and at least one carbon nono-tube membrane, wherein the pure carbon grid is provided with a plurality of meshes; and the at least one carbon nono-tube membrane covers the plurality of meshes of the pure carbon grid.